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References

No single textbook covers the modern span of this course, so the website itself serves as the primary text. The books below are the sources we draw on most heavily. Each module page also closes with its own focused reading list.

Core references

The first two books form the closest thing to a course text. Feldman and Mayer remains the standard treatment of the ion beam and electron spectroscopy core of this course, and Ohring places the characterization techniques in the context of how thin films are actually grown and used.

  1. L. C. Feldman and J. W. Mayer, Fundamentals of Surface and Thin Film Analysis, North-Holland (1986). The classic text on ion beam analysis, electron spectroscopy, and the physics of particle-solid interactions. Out of print but widely available.

  2. M. Ohring, Materials Science of Thin Films: Deposition and Structure, 2nd ed., Academic Press (2002). Thin film growth, structure, and characterization in one volume.

  3. C. R. Brundle, C. A. Evans, and S. Wilson (eds.), Encyclopedia of Materials Characterization: Surfaces, Interfaces, Thin Films, Butterworth-Heinemann (1992). Short, uniform entries on more than fifty techniques. The best first stop when you encounter an unfamiliar acronym.

  4. J. C. Vickerman and I. S. Gilmore (eds.), Surface Analysis: The Principal Techniques, 2nd ed., Wiley (2009). Chapter-length treatments of XPS, AES, SIMS, ion scattering, and scanning probes, more current than Feldman and Mayer.

  5. D. K. Schroder, Semiconductor Material and Device Characterization, 3rd ed., Wiley (2006). The metrology perspective: what industry actually measures and why.

By module

Surfaces and vacuum

  1. A. Zangwill, Physics at Surfaces, Cambridge University Press (1988). Surface thermodynamics, reconstruction, and adsorption.

  2. K. Oura, V. G. Lifshits, A. A. Saranin, A. V. Zotov, and M. Katayama, Surface Science: An Introduction, Springer (2003).

  3. J. F. O’Hanlon, A User’s Guide to Vacuum Technology, 3rd ed., Wiley (2003).

X-ray and optical metrology

  1. M. Birkholz, Thin Film Analysis by X-Ray Scattering, Wiley-VCH (2006). GIXRD, XRR, texture, and stress analysis of films.

  2. B. D. Cullity and S. R. Stock, Elements of X-Ray Diffraction, 3rd ed., Prentice Hall (2001). The standard diffraction background.

  3. H. Fujiwara, Spectroscopic Ellipsometry: Principles and Applications, Wiley (2007).

  4. H. G. Tompkins and E. A. Irene (eds.), Handbook of Ellipsometry, William Andrew (2005).

Ion beams and mass spectrometry

  1. W.-K. Chu, J. W. Mayer, and M.-A. Nicolet, Backscattering Spectrometry, Academic Press (1978). Still the definitive RBS reference.

  2. J. F. Ziegler, J. P. Biersack, and M. D. Ziegler, SRIM: The Stopping and Range of Ions in Matter, SRIM Co. (2008). See also srim.org.

  3. A. Benninghoven, F. G. Rüdenauer, and H. W. Werner, Secondary Ion Mass Spectrometry: Basic Concepts, Instrumental Aspects, Applications and Trends, Wiley (1987).

  4. B. Gault, M. P. Moody, J. M. Cairney, and S. P. Ringer, Atom Probe Microscopy, Springer (2012).

  5. B. Gault et al., Atom probe tomography, Nature Reviews Methods Primers 1, 51 (2021). Gault et al. (2021)

Electron spectroscopies

  1. J. F. Watts and J. Wolstenholme, An Introduction to Surface Analysis by XPS and AES, 2nd ed., Wiley (2020). The best short introduction.

  2. D. Briggs and M. P. Seah (eds.), Practical Surface Analysis, Vol. 1: Auger and X-ray Photoelectron Spectroscopy, 2nd ed., Wiley (1990). The practitioner’s reference.

  3. J. F. Moulder, W. F. Stickle, P. E. Sobol, and K. D. Bomben, Handbook of X-ray Photoelectron Spectroscopy, Perkin-Elmer (1992). The standard spectral reference tables.

  4. S. Hüfner, Photoelectron Spectroscopy: Principles and Applications, 3rd ed., Springer (2003). The deeper physics.

Electron and ion microscopy

  1. J. I. Goldstein et al., Scanning Electron Microscopy and X-Ray Microanalysis, 4th ed., Springer (2018).

  2. D. B. Williams and C. B. Carter, Transmission Electron Microscopy: A Textbook for Materials Science, 2nd ed., Springer (2009).

  3. R. F. Egerton, Electron Energy-Loss Spectroscopy in the Electron Microscope, 3rd ed., Springer (2011).

  4. S. J. Pennycook and P. D. Nellist (eds.), Scanning Transmission Electron Microscopy: Imaging and Analysis, Springer (2011).

  5. A. Ichimiya and P. I. Cohen, Reflection High-Energy Electron Diffraction, Cambridge University Press (2004).

  6. L. A. Giannuzzi and F. A. Stevie (eds.), Introduction to Focused Ion Beams, Springer (2005).

Scanning probe microscopy

  1. B. Voigtländer, Atomic Force Microscopy, 2nd ed., Springer (2019).

  2. C. J. Chen, Introduction to Scanning Tunneling Microscopy, 3rd ed., Oxford University Press (2021).

References
  1. Gault, B., Chiaramonti, A., Cojocaru-Mirédin, O., Stender, P., Dubosq, R., Freysoldt, C., Makineni, S. K., Li, T., Moody, M., & Cairney, J. M. (2021). Atom probe tomography. Nature Reviews Methods Primers, 1(1). 10.1038/s43586-021-00047-w